| 000 | 00983nac a22002411u 4500 | ||
|---|---|---|---|
| 008 | 111027s2008 fluill |r|||| 001 0 eng d | ||
| 010 | _a2004057931 | ||
| 020 | _a0849328381 (alk. paper) | ||
| 020 | _a9780849328381 (alk. paper) | ||
| 082 | 0 | 0 |
_a621.381 _bLYS _222 |
| 100 |
_aLyshevski, Sergey Edwa _927646 |
||
| 245 | 1 | 0 |
_aNano- and Micro-Electromechanical Systems : _bFundamentals of Nano- and Microengineering / _cSergey Edward Lyshevski. |
| 250 | _a2nd ed. | ||
| 260 |
_aBoca Raton, Fla. : _bCRC Press, 2005 _cc2005. |
||
| 300 |
_a722 p. : _bill. ; _c26 cm. |
||
| 490 |
_927645 _aNano- and Microscience, Engineering, Technology, and Medicine Series ; _v8 |
||
| 504 | _aIncludes bibliographical references and index. | ||
| 650 | 0 |
_aMicroelectromechanical systems. _927647 |
|
| 650 | 0 |
_aNanotechnology. _927648 |
|
| 653 |
_bEle _cOctober2011 |
||
| 856 | 4 | 2 |
_3Publisher description _uhttp://www.loc.gov/catdir/enhancements/fy0647/2004057931-d.html |
| 942 |
_cBB _k621.381LYS _2ddc |
||
| 999 |
_c829 _d829 |
||