000			01499cac a22003855a 4500
008			120612s2006 xxuadl|| |||| 001 0ceng d
010			_a 2005051409
020			_a0849391393 (alk. paper)
020			_a0849321069 (set : alk. paper)
020			_a9780849391392
082	0	4	_a621.381 _bMEM _222
245	0	4	_aMEMS : _bapplications / _cedited by Mohamed Gad-el-Hak.
250			_a2nd ed.
260			_aBoca Raton, Florida : _bCRC Press / Taylor & Francis, _cc.2006.
300			_a1 v. (various pagings), : _bill. ; _c26 cm.
490	1		_aMechanical engineering series
490	1		_aThe MEMS handbook
500			_aOne of three parts whose previous edition was a published as a single volume.
500			_aIndex : p. (I1-I14).
500			_aDistributer: Al-Ahram.
504			_aBibliography : p. (15-34) - (15-35).
511			_aCatalogued By: Mahitab.
590			_aMustafa galal.
650		0	_aMicroelectromechanical systems. _930085 _2BUEsh
650		0	_aDetectors. _930086 _2BUEsh
650		0	_aMicroactuators. _930087 _2BUEsh
650		0	_aRobots. _930088 _2BUEsh
651			_2BUEsh
653			_bCOMSCI _cAugust2015
700	1		_aGad-el-Hak, Mohamed, _d1945- _930089 _eeditor.
830		0	_aMechanical engineering series (Boca Raton, Fla.) _930090
856	4	1	_3Table of contents only _uhttp://www.loc.gov/catdir/toc/fy0702/2005051409.html
856	4	1	_3Publisher description _uhttp://www.loc.gov/catdir/enhancements/fy0653/2005051409-d.html
942			_cBB _k621.381GAD _2ddc
999			_c8002 _d8002