| 000 | 00943nac a22002171u 4500 | ||
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| 090 | _c7969 | ||
| 008 | 090203t2006 xxu||||| |||| 00| 0 eng d | ||
| 010 | _a2005048932 | ||
| 020 | _a0131472860 | ||
| 035 | _a(OCoLC)ocm60550857 | ||
| 082 | 0 | 0 |
_a621.3 _bLIU |
| 100 | _aLiu, Chang, | ||
| 245 | 1 | 0 |
_aFoundations of MEMS / _cChang Liu. |
| 260 |
_aUpper Saddle River, NJ : _bPearson/Prentice Hall, _cc2006. |
||
| 300 |
_axxii, 530 p. : _bill. ; _c25 cm. |
||
| 504 | _aIncludes bibliographical references and index. | ||
| 650 | 0 | _aMicroelectromechanical systems. | |
| 942 |
_cBB _k621.3LIU _2ddc |
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| 952 |
_w2008-02-14 _p000009723 _r2008-02-14 _40 _epurchase _00 _u9837 _bMAIN _10 _o621.3 LIU _d2014-02-08 _8Alahram _70 _cLIB1 _2ddc _yBB _aMAIN |
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| 999 |
_c7969 _d7969 |
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| 952 |
_w2009-02-03 _p000014491 _r2009-02-03 _40 _epurchase _00 _u15192 _bMAIN _10 _o621.3 LIU _d2009-02-03 _8Alahram _h6459 _70 _cLIB1 _2ddc _g228.50 _yBB _aMAIN |
||