000 | 01220nac a22003011u 4500 | ||
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010 | _a 97026052 | ||
020 | _a0471966819 (v. 1 : alk. paper) | ||
020 | _a0471966827 (v. 2 : alk. paper) | ||
020 | _a0471980846 (set : alk. paper) | ||
035 | _a(DLC) 97026052 | ||
082 | 0 | 0 |
_a621.38152 _bCAM |
090 |
_c6703 _d6703 |
||
100 | _aCampbell, S.A. [ed.] | ||
245 | 0 | 0 |
_aSemiconductor micromachining / _cedited by S.A. Campbell, H.J. Lewerenz. |
260 |
_aChichester, England ; _aNew York : _bWiley, c1998. _cc1998. |
||
300 |
_a2 v. : _bill. ; _c24 cm. |
||
500 | _aDistributer: Al-Ahram. | ||
504 | _aIncludes bibliographical references and index. | ||
505 | 0 | _av. 1. Fundamental electrochemistry and physics -- v. 2. Techniques and industrial applications. | |
511 | _aCatalogued By: Mahitab. | ||
650 | 0 |
_aSemiconductors _xDesign and construction. |
|
650 | 0 | _aMicromachining. | |
650 | 0 | _aMicrofabrication. | |
700 | 1 | _aLewerenz, H.- J. | |
856 | 4 | 2 |
_3Publisher description _uhttp://www.loc.gov/catdir/description/wiley033/97026052.html |
856 | 4 | 2 |
_3Table of Contents _uhttp://www.loc.gov/catdir/toc/onix03/97026052.html |
942 |
_cBB _k621.38152CAM |
||
952 |
_p000008027 _u8372 _dMAIN _v2029-11-07 _y0 _bMAIN |
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999 |
_c6703 _d6703 |