| 000 | 01052nam a22002895a 4500 | ||
|---|---|---|---|
| 005 | 20150813142341.0 | ||
| 008 | 150812b1993 caua|||frb||| 001 0 eng d | ||
| 010 | _a 93006882 | ||
| 020 | _a0122476905 (acid-free paper) | ||
| 040 |
_aEG-ScBUE _beng _cEG-ScBUE |
||
| 082 | 0 | 4 |
_a621.38152 _bRAP _222 |
| 100 | _a | ||
| 245 | 0 | 0 |
_aRapid thermal processing : _bscience and technology / _cedited by Richard B. Fair. |
| 260 |
_aSan Diego : _bAcademic Press, _cc.1993. |
||
| 300 |
_aviii, 430 p. : _bill. ; _c24 cm. |
||
| 500 | _aIndex : p. 425-430. | ||
| 504 | _aIncludes bibliographical references. | ||
| 590 | _aMenna Elemam | ||
| 650 | 0 |
_aSemiconductors-- _xHeat treatment. _2BUEsh |
|
| 650 | 0 |
_aSemiconductor doping. _2BUEsh |
|
| 650 | 0 |
_aRapid thermal processing. _2BUEsh |
|
| 651 | _2BUEsh | ||
| 653 |
_bENGCHE _cAugust2015 |
||
| 856 | 4 | 2 |
_3Publisher description _uhttp://www.loc.gov/catdir/description/els032/93006882.html |
| 856 | 4 | 2 |
_3Table of contents _uhttp://www.loc.gov/catdir/toc/els032/93006882.html |
| 942 |
_cBB _k621.38152 RAP _2ddc |
||
| 999 |
_c6566 _d4316 |
||