000			01898nam a2200385 i 4500
001			020208825
003			EG-ScBUE
005			20230213025032.0
008			210526t2021 nyua f b 001 0 eng d
020			_a9781264257584
020			_a1264257589
040			_aStDuBDS _beng _erda _cStDuBDS _dUk _dEG-ScBUE
082	0	4	_a621.381 _222 _bKIM
100	1		_aKim, Eun Sok, _eauthor.
245	1	0	_aFundamentals of microelectromechanical systems (MEMS) / _cEun Sok Kim.
246	3	0	_aMicroelectromechanical systems (MEMS)
264		1	_aNew York : _bMcGraw-Hill, _c[2021]
264		4	_c©2021
300			_axviii, 396 pages : _billustrations (black and white) ; _c25 cm
336			_atext _2rdacontent _btxt
336			_astill image _2rdacontent _btxt
337			_aunmediated _2rdamedia _bn
338			_avolume _2rdacarrier _bnc
504			_aIncludes bibliographical references and index.
520	0		_aThis textbook is intended for undergraduate seniors and graduate students in electrical, mechanical, and biomedical engineering as well as professional engineers who want to learn MEMS technology. This textbook is aimed to teach design, fabrication and testing of MEMS and contains many questions and problems for the students? homework and exams for the sake of in-depth understanding of MEMS as well as problem-solving and/or design skills in MEMS analysis and design.
650		7	_aMicroelectromechanical systems. _2BUEsh
650		7	_aSemiconductors _xDesign and construction _xComputer network resources. _2BUEsh
650		7	_aIntegrated circuits _xDesign and construction _xComputer network resources. _2BUEsh
650		7	_aSemiconductors _xMaterials _xComputer network resources. _2BUEsh
650		7	_aIntegrated circuits _xReliability _xComputer network resources. _2BUEsh
653			_bENGGEN _cFebruary2023
655			_vReading book
942			_2ddc _cBB
999			_c30133 _d30104