| 000 | 00721cam a22002175a 4500 | ||
|---|---|---|---|
| 001 | 12911145 | ||
| 005 | 20180225115911.0 | ||
| 008 | 020829s2003 flua frb 001 0 eng d | ||
| 020 | _a1584883065 | ||
| 040 |
_aDLC _cDLC _dDLC _dEG-ScBUE _beng |
||
| 082 | 0 | 4 |
_a621.3 _222 _bPEL |
| 100 | 1 | _aPelesko, John A. | |
| 245 | 1 | 0 |
_aModeling MEMS and NEMS / _cJohn A. Pelesko and David H. Bernstein. |
| 260 |
_aBoca Raton : _bChapman & Hall / CRC, _c2003. |
||
| 300 |
_axxiii, 357 p. : _bill. ; _c24 cm. |
||
| 504 | _aIncludes bibliographical references and index. | ||
| 650 | 7 |
_aMicroelectromechanical systems _xMathematical models. _2BUEsh |
|
| 653 |
_bGGEN _bENGGEN _cFebruary2018 |
||
| 700 | 1 | _aBernstein, David H. | |
| 942 | _2ddc | ||
| 999 |
_c26167 _d26139 |
||