000			01425cam a22002895a 4500
001			1107870
005			20171224114918.0
008			930816s1994 dcua frb f101 0 eng d
020			_a0841227217
040			_aDLC _cDLC _dDLC _dEG-ScBUE _beng
082	0	4	_a621.381531 _222 _bPOL
245	0	0	_aPolymers for microelectronics : _bresists and dielectrics / _ceditors Larry F. Thompson, C. Grant Willson, Seiichi Tagawa.
260			_aWashington : _bAmerican Chemical Society, _c1994.
300			_axii, 571 p. : _bill. ; _c24 cm.
500			_a"Developed from a symposium sponsored by the Division of Polymeri Materials: Science and Engineering, Inc., of the American Chemical Society and the Society of Polymer Science, Japan, at the 203rd National Meeting of the American Chemical Society, San Francisco, California, April 5-10, 1992."
504			_aIncludes bibliographical references and indexes.
650		7	_aMicroelectronics _xMaterials _xCongresses. _2BUEsh
650		7	_aPolymers _xCongresses. _2BUEsh
651			_2BUEsh
653			_bGGEN _cDecember2017
700	1		_aThompson, L. F., _d1944- _eeditor.
700	1		_aWillson, C. G. _q(C. Grant) _d1939- _eeditor.
700	1		_aTagawa, Seiichi, _eeditor.
710	2		_aAmerican Chemical Society. _bDivision of Polymeric Materials: Science and Engineering. _97424
710	2		_aAmerican Chemical Society. _bMeeting _n(203rd : _d1992 : _cSan Francisco, Calif.)
942			_2ddc
999			_c25777 _d25749