| 000 | 00892cam a22002535a 4500 | ||
|---|---|---|---|
| 001 | 17528725 | ||
| 005 | 20161207110834.0 | ||
| 008 | 121114s2012 maua frb 001 0 eng d | ||
| 020 | _a9781437778731 | ||
| 020 | _a1437778739 | ||
| 040 |
_aUKMGB _cUKMGB _dBTCTA _dOCLCO _dYDXCP _dBWX _dCUV _dCDX _dDLC _dEG-ScBUE _beng |
||
| 082 | 0 | 4 |
_a621.38152 _222 _bHAN |
| 245 | 0 | 0 |
_aHandbook of thin film deposition : _btechniques, processes, and technologies / _cedited by Krishna Seshan. |
| 250 | _a3rd ed. | ||
| 260 |
_aWaltham ; _aOxford : _bWilliam Andrew / Elsevier, _c2012. |
||
| 300 |
_axviii, 392 p. : _bill. ; _c24 cm. |
||
| 504 | _aIncludes bibliographical references and index. | ||
| 650 | 7 |
_aThin films. _2BUEsh _911415 |
|
| 650 | 7 |
_aThin film devices _xDesign and construction. _2BUEsh |
|
| 651 | _2BUEsh | ||
| 653 |
_bENGGEN _cDecember2016 |
||
| 700 | 1 |
_aSeshan, Krishna, _eeditor. |
|
| 942 | _2ddc | ||
| 999 |
_c23488 _d23460 |
||