000			02678cam a2200289 i 4500
001			17324779
005			20150113145723.0
008			120530s2013 xxka frb f001 0 eng d
010			_a2012021830
020			_a9780521764834 (hardback)
040			_aDLC _beng _erda _cDLC _dDLC _dEG-ScBUE
082	0	0	_a621.381 _222 _bJON
100	1		_aJones, T. B. _q(Thomas Byron), _d1944- _937138
245	1	0	_aElectromechanics and MEMS / _cThomas B. Jones, Nenad G. Nenadic.
260			_aCambridge, United Kingdom ; _aNew York, United States : _bCambridge University Press, _c2013.
300			_axx, 559 p. : _bill. ; _c26 cm.
500			_aIncludes appendixes.
500			_aIndex : p. 552-559.
504			_aIncludes bibliographical references.
505	8		_aMachine generated contents note : 1. Introduction ; 2. Circuit-based modeling ; 3. Capacitive lumped parameter electromechanics ; 4. Small-signal capacitive electromechanical systems ; 5. Electromechanics of piezoelectric elements ; 6. Capacitive sensing and resonant drive circuits ; 7. Distributed 1D and 2D electromechanical structures ; 8. Practical MEMS : pressure transducers, accelerometers and gyroscopes ; 9. Electromechanics of magnetic MEMS devices ; A. Review of quasistatic electromagnetics ; B. Review of mechanical resonators; C. Brief survey of MEMS fabrication ; D. A brief review of solid mechanics ; E. Tables of M- and N-form transducer matrics ; F. Finite element analysis as applied to MEMS.
520			_a"Offering a consistent, systematic approach to capacitive, piezoelectric and magnetic MEMS, from basic electromechanical transducers to high-level models for sensors and actuators, this comprehensive textbook equips graduate and senior-level undergraduate students with all the resources necessary to design and develop practical, system-level MEMS models. The concise yet thorough treatment of the underlying principles of electromechanical transduction provides a solid theoretical framework for this development, with each new topic related back to the core concepts. Repeated references to the shared commonalities of all MEMS encourage students to develop a systems-based design perspective. Extensive use is made of easy-to-interpret electrical and mechanical analogs, such as electrical circuits, electromechanical two-port models and the cascade paradigm. Each chapter features worked examples and numerous problems, all designed to test and extend students' understanding of the key principles"
650		0	_aMicroelectromechanical systems _927647
653			_bENGELC _cJanuary2015
655			_vreading book _934232
700	1		_aNenadic, Nenad G. _937139
942			_2ddc _k621.381 JON
999			_c18867 _d18839