| 000 | 00966nam a22002537a 4500 | ||
|---|---|---|---|
| 005 | 20120219165115.0 | ||
| 008 | 120219s2012 nju|||||r|||| 001 0 eng d | ||
| 020 | _a0273752243 | ||
| 020 | _a9780273752240 | ||
| 082 |
_222 _a621.3 _bLIU |
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| 100 |
_929008 _aLiu, Chang |
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| 245 |
_aFoundations of MEMS / _cChang Liu. |
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| 250 |
_a2nd ed. / _binternational edition contributions by Vaishali B. Mungurwadi, Anil V. Nandi. |
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| 260 |
_aUpper Saddle River : _bPrentice Hall, _cc2012. |
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| 300 |
_a576 p. : _bill ; _c23 cm. |
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| 500 | _a"International edition". | ||
| 504 | _aIncludes bibliographical references and index. | ||
| 650 |
_927647 _aMicroelectromechanical systems. |
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| 653 |
_bMec _cFebruary2012 |
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| 700 |
_929009 _aMungurwadi, Vaishali B. |
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| 700 |
_929010 _aNandi, Anil V. |
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| 942 |
_2ddc _cBB |
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| 999 |
_c16490 _d16490 |
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| 952 |
_p000026148 _40 _epurchase _00 _u27516 _bMAIN _10 _o621.3 LIU _d2012-02-19 _8Alahram _h681 _70 _cLIB1 _2ddc _g199 _yBB _aMAIN |
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