Foundations of MEMS / Chang Liu. by
- Liu, Chang
- Mungurwadi, Vaishali B
- Nandi, Anil V
Edition: 2nd ed. / international edition contributions by Vaishali B. Mungurwadi, Anil V. Nandi.
Material type: 
Text; Literary form:
Not fiction
Publication details: Upper Saddle River : Prentice Hall, c2012
Availability: Items available for loan: Central Library (1)Call number: 621.3 LIU.