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Polymers for microelectronics : resists and dielectrics / editors Larry F. Thompson, C. Grant Willson, Seiichi Tagawa. by
- Thompson, L. F, 1944- [editor.]
- Willson, C. G. (C. Grant), 1939- [editor.]
- Tagawa, Seiichi [editor.]
- American Chemical Society. Division of Polymeric Materials: Science and Engineering
- American Chemical Society. Meeting (203rd : 1992 : San Francisco, Calif.)
Material type:  Text; Literary form:
Not fiction
; Audience:
Specialized;
Publication details: Washington : American Chemical Society, 1994
Availability: Items available for loan: Central Library (1)Call number: 621.381531 POL.
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