TY  - GEN
AU  - Lyshevski, Sergey Edwa       
TI  - Nano- and Micro-Electromechanical Systems: Fundamentals of Nano- and Microengineering 
T2  - Nano- and Microscience, Engineering, Technology, and Medicine Series
SN  - 0849328381 (alk. paper)
U1  - 621.381 22
PY  - 2005///
CY  - Boca Raton, Fla.
PB  - CRC Press, 2005
KW  - Microelectromechanical systems
KW  - Nanotechnology
KW  - Ele
KW  - October2011
N1  - Includes bibliographical references and index
UR  - http://www.loc.gov/catdir/enhancements/fy0647/2004057931-d.html
ER  -