TY - GEN AU - Gad-el-Hak,Mohamed TI - MEMS: applications T2 - Mechanical engineering series SN - 0849391393 (alk. paper) U1 - 621.381 22 PY - 2006/// CY - Boca Raton, Florida PB - CRC Press / Taylor & Francis KW - Microelectromechanical systems KW - BUEsh KW - Detectors KW - Microactuators KW - Robots KW - COMSCI KW - August2015 N1 - One of three parts whose previous edition was a published as a single volume; Index : p. (I1-I14).; Distributer: Al-Ahram; Bibliography : p. (15-34) - (15-35).; Catalogued By: Mahitab UR - http://www.loc.gov/catdir/toc/fy0702/2005051409.html UR - http://www.loc.gov/catdir/enhancements/fy0653/2005051409-d.html ER -