TY  - GEN
TI  - MEMS: design and fabrication 
T2  - Mechanical engineering series
SN  - 0849391385 (alk. paper)
U1  - 621.381 22
PY  - 2006///
CY  - Boca Raton, Florida
PB  - CRC/Taylor & Francis
KW  - Microelectromechanical systems
KW  - Design and construction
KW  - BUEsh
KW  - Microfabrication
KW  - ENGGEN
KW  - August2015
N1  - Index : I1- I17; Includes bibliographical references.
UR  - http://www.loc.gov/catdir/toc/fy0702/2005050109.html
UR  - http://www.loc.gov/catdir/enhancements/fy0668/2005050109-d.html
ER  -