TY  - GEN
AU  - Liu, Chang,                  
TI  - Foundations of MEMS
SN  - 0131472860
U1  - 621.3 
PY  - 2006///
CY  - Upper Saddle River, NJ
PB  - Pearson/Prentice Hall
KW  - Microelectromechanical systems
N1  - Includes bibliographical references and index
ER  -