TY  - GEN
AU  - Campbell,  S.A. [ed.]        
AU  - Lewerenz,H.- J.
TI  - Semiconductor micromachining
SN  - 0471966819 (v. 1 : alk. paper)
U1  - 621.38152 
PY  - 1998///
CY  - Chichester, England, New York
PB  - Wiley, c1998.
KW  - Semiconductors
KW  - Design and construction
KW  - Micromachining
KW  - Microfabrication
N1  - Distributer: Al-Ahram; Includes bibliographical references and index; v. 1. Fundamental electrochemistry and physics -- v. 2. Techniques and industrial applications; Catalogued By: Mahitab
UR  - http://www.loc.gov/catdir/description/wiley033/97026052.html
UR  - http://www.loc.gov/catdir/toc/onix03/97026052.html
ER  -