TY  - BOOK
AU  -      
TI  - Rapid thermal processing: science and technology 
SN  - 0122476905 (acid-free paper)
U1  - 621.38152 22
PY  - 1993///
CY  - San Diego
PB  - Academic Press
KW  - Semiconductors--
KW  - Heat treatment
KW  - BUEsh
KW  - Semiconductor doping
KW  - Rapid thermal processing
KW  - ENGCHE
KW  - August2015
N1  - Index : p. 425-430; Includes bibliographical references
UR  - http://www.loc.gov/catdir/description/els032/93006882.html
UR  - http://www.loc.gov/catdir/toc/els032/93006882.html
ER  -