TY  - BOOK
AU  - Pelesko,John A.
AU  - Bernstein,David H.
TI  - Modeling MEMS and NEMS
SN  - 1584883065
U1  - 621.3 22
PY  - 2003///
CY  - Boca Raton
PB  - Chapman & Hall / CRC
KW  - Microelectromechanical systems
KW  - Mathematical models
KW  - BUEsh
KW  - GGEN
KW  - ENGGEN
KW  - February2018
N1  - Includes bibliographical references and index
ER  -