TY  - BOOK
AU  - Thompson,L.F.
AU  - Willson,C.G.
AU  - Tagawa,Seiichi
ED  - American Chemical Society.
ED  - American Chemical Society.
TI  - Polymers for microelectronics: resists and dielectrics 
SN  - 0841227217
U1  - 621.381531 22
PY  - 1994///
CY  - Washington
PB  - American Chemical Society
KW  - Microelectronics
KW  - Materials
KW  - Congresses
KW  - BUEsh
KW  - Polymers
KW  - GGEN
KW  - December2017
N1  - "Developed from a symposium sponsored by the Division of Polymeri Materials: Science and Engineering, Inc., of the American Chemical Society and the Society of Polymer Science, Japan, at the 203rd National Meeting of the American Chemical Society, San Francisco, California, April 5-10, 1992."; Includes bibliographical references and indexes
ER  -