TY  - BOOK
AU  - Seshan,Krishna
TI  - Handbook of thin film deposition: techniques, processes, and technologies 
SN  - 9781437778731
U1  - 621.38152 22
PY  - 2012///
CY  - Waltham, Oxford
PB  - William Andrew / Elsevier
KW  - Thin films
KW  - BUEsh
KW  - Thin film devices
KW  - Design and construction
KW  - ENGGEN
KW  - December2016
N1  - Includes bibliographical references and index
ER  -