TY  - GEN
AU  - tai-ran husu                 
TI  - mems packaging
T2  - emis processing series
SN  - 0863413358
U1  - 621.381 22 
PY  - 1988///
CY  - uk
PB  - inspec:the institution of electrical engineers , united kingdom
KW  - tai-ran hsu
ER  -