TY  - BOOK
AU  - Yao,Nan
TI  - Focused ion beam systems: basics and applications 
SN  - 9780521158596 (pbk.)
U1  - 621.38152 22
PY  - 2007///
CY  - Cambridge, United Kingdom, New York, United States
PB  - Cambridge University Press
KW  - Focused ion beams
KW  - Industrial applications
KW  - ENGELC
KW  - January2015
KW  - reading book
N1  - Index : p. 391-395; Reprint of the 2007 ed; Includes bibliographical references
ER  -