TY  - BOOK
AU  - Jones,T.B.
AU  - Nenadic,Nenad G.
TI  - Electromechanics and MEMS
SN  - 9780521764834 (hardback)
U1  - 621.381 22
PY  - 2013///
CY  - Cambridge, United Kingdom, New York, United States
PB  - Cambridge University Press, 
KW  - Microelectromechanical systems
KW  - ENGELC
KW  - January2015
KW  - reading book
N1  - Includes appendixes; Index : p. 552-559; Includes bibliographical references; Machine generated contents note : 1. Introduction ; 2. Circuit-based modeling ; 3. Capacitive lumped parameter electromechanics ; 4. Small-signal capacitive electromechanical systems ; 5. Electromechanics of piezoelectric elements ; 6. Capacitive sensing and resonant drive circuits ; 7. Distributed 1D and 2D electromechanical structures ; 8. Practical MEMS : pressure transducers, accelerometers and gyroscopes ; 9. Electromechanics of magnetic MEMS devices ; A. Review of quasistatic electromagnetics ; B. Review of mechanical resonators; C. Brief survey of MEMS fabrication ; D. A brief review of solid mechanics ; E. Tables of M- and N-form transducer matrics ; F. Finite element analysis as applied to MEMS
N2  - "Offering a consistent, systematic approach to capacitive, piezoelectric and magnetic MEMS, from basic electromechanical transducers to high-level models for sensors and actuators, this comprehensive textbook equips graduate and senior-level undergraduate students with all the resources necessary to design and develop practical, system-level MEMS models. The concise yet thorough treatment of the underlying principles of electromechanical transduction provides a solid theoretical framework for this development, with each new topic related back to the core concepts. Repeated references to the shared commonalities of all MEMS encourage students to develop a systems-based design perspective. Extensive use is made of easy-to-interpret electrical and mechanical analogs, such as electrical circuits, electromechanical two-port models and the cascade paradigm. Each chapter features worked examples and numerous problems, all designed to test and extend students' understanding of the key principles"
ER  -