TY  - BOOK
AU  - Liu, Chang
AU  - Mungurwadi, Vaishali B.
AU  - Nandi, Anil V.
TI  - Foundations of MEMS
SN  - 0273752243
U1  - 621.3 22
PY  - 2012///
CY  - Upper Saddle River
PB  - Prentice Hall
KW  - Microelectromechanical systems
KW  - Mec
KW  - February2012
N1  - "International edition"; Includes bibliographical references and index
ER  -