Semiconductor micromachining / edited by S.A. Campbell, H.J. Lewerenz.
Material type: TextPublication details: Chichester, England ; New York : Wiley, c1998. c1998.Description: 2 v. : ill. ; 24 cmISBN:- 0471966819 (v. 1 : alk. paper)
- 0471966827 (v. 2 : alk. paper)
- 0471980846 (set : alk. paper)
- 621.38152 CAM
Item type | Current library | Call number | Status | Date due | Barcode | Item holds |
---|---|---|---|---|---|---|
Book - Borrowing | Central Library First floor | 621.38152CAM (Browse shelf(Opens below)) | Available | 000008027 |
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Distributer: Al-Ahram.
Includes bibliographical references and index.
v. 1. Fundamental electrochemistry and physics -- v. 2. Techniques and industrial applications.
Catalogued By: Mahitab.
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