MARC details
000 -LEADER |
fixed length control field |
01220nac a22003011u 4500 |
010 ## - LIBRARY OF CONGRESS CONTROL NUMBER |
LC control number |
97026052 |
020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
International Standard Book Number |
0471966819 (v. 1 : alk. paper) |
020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
International Standard Book Number |
0471966827 (v. 2 : alk. paper) |
020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
International Standard Book Number |
0471980846 (set : alk. paper) |
035 ## - SYSTEM CONTROL NUMBER |
System control number |
(DLC) 97026052 |
082 00 - DEWEY DECIMAL CLASSIFICATION NUMBER |
Classification number |
621.38152 |
Item number |
CAM |
090 ## - LOCALLY ASSIGNED LC-TYPE CALL NUMBER (OCLC); LOCAL CALL NUMBER (OCLC) |
-- |
6703 |
-- |
6703 |
100 ## - MAIN ENTRY--PERSONAL NAME |
Personal name |
Campbell, S.A. [ed.] |
245 00 - TITLE STATEMENT |
Title |
Semiconductor micromachining / |
Statement of responsibility, etc |
edited by S.A. Campbell, H.J. Lewerenz. |
260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT) |
Place of publication, distribution, etc |
Chichester, England ; |
-- |
New York : |
Name of publisher, distributor, etc |
Wiley, c1998. |
Date of publication, distribution, etc |
c1998. |
300 ## - PHYSICAL DESCRIPTION |
Extent |
2 v. : |
Other physical details |
ill. ; |
Dimensions |
24 cm. |
500 ## - GENERAL NOTE |
General note |
Distributer: Al-Ahram. |
504 ## - BIBLIOGRAPHY, ETC. NOTE |
Bibliography, etc |
Includes bibliographical references and index. |
505 0# - FORMATTED CONTENTS NOTE |
Formatted contents note |
v. 1. Fundamental electrochemistry and physics -- v. 2. Techniques and industrial applications. |
511 ## - PARTICIPANT OR PERFORMER NOTE |
Participant or performer note |
Catalogued By: Mahitab. |
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
Topical term or geographic name as entry element |
Semiconductors |
General subdivision |
Design and construction. |
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
Topical term or geographic name as entry element |
Micromachining. |
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
Topical term or geographic name as entry element |
Microfabrication. |
700 1# - ADDED ENTRY--PERSONAL NAME |
Personal name |
Lewerenz, H.- J. |
856 42 - ELECTRONIC LOCATION AND ACCESS |
Materials specified |
Publisher description |
Uniform Resource Identifier |
<a href="http://www.loc.gov/catdir/description/wiley033/97026052.html">http://www.loc.gov/catdir/description/wiley033/97026052.html</a> |
856 42 - ELECTRONIC LOCATION AND ACCESS |
Materials specified |
Table of Contents |
Uniform Resource Identifier |
<a href="http://www.loc.gov/catdir/toc/onix03/97026052.html">http://www.loc.gov/catdir/toc/onix03/97026052.html</a> |
942 ## - ADDED ENTRY ELEMENTS (KOHA) |
Item type |
Book - Borrowing |
Call number prefix |
621.38152CAM |
952 ## - LOCATION AND ITEM INFORMATION (KOHA) |
-- |
2007-11-29 |