MARC details
| 000 -LEADER |
|---|
| fixed length control field |
01052nam a22002895a 4500 |
| 005 - DATE AND TIME OF LATEST TRANSACTION |
|---|
| control field |
20150813142341.0 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION |
|---|
| fixed length control field |
150812b1993 caua|||frb||| 001 0 eng d |
| 010 ## - LIBRARY OF CONGRESS CONTROL NUMBER |
|---|
| LC control number |
93006882 |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
|---|
| International Standard Book Number |
0122476905 (acid-free paper) |
| 040 ## - CATALOGING SOURCE |
|---|
| Original cataloging agency |
EG-ScBUE |
| Language of cataloging |
eng |
| Transcribing agency |
EG-ScBUE |
| 082 04 - DEWEY DECIMAL CLASSIFICATION NUMBER |
|---|
| Classification number |
621.38152 |
| Item number |
RAP |
| Edition number |
22 |
| 100 ## - MAIN ENTRY--PERSONAL NAME |
|---|
| Personal name |
|
| 245 00 - TITLE STATEMENT |
|---|
| Title |
Rapid thermal processing : |
| Remainder of title |
science and technology / |
| Statement of responsibility, etc |
edited by Richard B. Fair. |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT) |
|---|
| Place of publication, distribution, etc |
San Diego : |
| Name of publisher, distributor, etc |
Academic Press, |
| Date of publication, distribution, etc |
c.1993. |
| 300 ## - PHYSICAL DESCRIPTION |
|---|
| Extent |
viii, 430 p. : |
| Other physical details |
ill. ; |
| Dimensions |
24 cm. |
| 500 ## - GENERAL NOTE |
|---|
| General note |
Index : p. 425-430. |
| 504 ## - BIBLIOGRAPHY, ETC. NOTE |
|---|
| Bibliography, etc |
Includes bibliographical references. |
| 590 ## - LOCAL NOTE (RLIN) |
|---|
| Local note |
Menna Elemam |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name as entry element |
Semiconductors-- |
| General subdivision |
Heat treatment. |
| Source of heading or term |
BUEsh |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name as entry element |
Semiconductor doping. |
| Source of heading or term |
BUEsh |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name as entry element |
Rapid thermal processing. |
| Source of heading or term |
BUEsh |
| 651 ## - SUBJECT ADDED ENTRY--GEOGRAPHIC NAME |
|---|
| Source of heading or term |
BUEsh |
| 653 ## - INDEX TERM--UNCONTROLLED |
|---|
| Resource For college |
Engineering, Chemical |
| Arrived date list |
August2015 |
| 856 42 - ELECTRONIC LOCATION AND ACCESS |
|---|
| Materials specified |
Publisher description |
| Uniform Resource Identifier |
<a href="http://www.loc.gov/catdir/description/els032/93006882.html">http://www.loc.gov/catdir/description/els032/93006882.html</a> |
| 856 42 - ELECTRONIC LOCATION AND ACCESS |
|---|
| Materials specified |
Table of contents |
| Uniform Resource Identifier |
<a href="http://www.loc.gov/catdir/toc/els032/93006882.html">http://www.loc.gov/catdir/toc/els032/93006882.html</a> |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) |
|---|
| Item type |
Book - Borrowing |
| Call number prefix |
621.38152 RAP |
| Source of classification or shelving scheme |
Dewey Decimal Classification |