Nano- and Micro-Electromechanical Systems :
Lyshevski, Sergey Edwa
Nano- and Micro-Electromechanical Systems : Fundamentals of Nano- and Microengineering / Sergey Edward Lyshevski. - 2nd ed. - Boca Raton, Fla. : CRC Press, 2005 c2005. - 722 p. : ill. ; 26 cm. - Nano- and Microscience, Engineering, Technology, and Medicine Series ; 8 .
Includes bibliographical references and index.
0849328381 (alk. paper) 9780849328381 (alk. paper)
2004057931
Microelectromechanical systems.
Nanotechnology.
621.381 / LYS
Nano- and Micro-Electromechanical Systems : Fundamentals of Nano- and Microengineering / Sergey Edward Lyshevski. - 2nd ed. - Boca Raton, Fla. : CRC Press, 2005 c2005. - 722 p. : ill. ; 26 cm. - Nano- and Microscience, Engineering, Technology, and Medicine Series ; 8 .
Includes bibliographical references and index.
0849328381 (alk. paper) 9780849328381 (alk. paper)
2004057931
Microelectromechanical systems.
Nanotechnology.
621.381 / LYS