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MEMS :

MEMS : design and fabrication / edited by Mohamed Gad-el-Hak. - 2nd ed. - Boca Raton, Florida : CRC/Taylor & Francis, c.2006. - [various pagings] : ill., photos ; 26 cm. - Mechanical engineering series . - Mechanical engineering series (Boca Raton, Fla.) .

Index : I1- I17.

Includes bibliographical references.

ISBN: 0849391385 (alk. paper) 9780849391385

LCCN: 2005050109

Subjects--Topical Terms:
Microelectromechanical systems--Design and construction.
Microfabrication.

Subjects--Geographic Terms:

Subjects--Index Terms:

Dewey Class. No.: 621.381 / MEM

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