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Foundations of MEMS /

Liu, Chang,

Foundations of MEMS / Chang Liu. - Upper Saddle River, NJ : Pearson/Prentice Hall, c2006. - xxii, 530 p. : ill. ; 25 cm.

Includes bibliographical references and index.

ISBN: 0131472860

LCCN: 2005048932

Subjects--Topical Terms:
Microelectromechanical systems.

Dewey Class. No.: 621.3 / LIU

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