Semiconductor micromachining /
Campbell, S.A. [ed.]
Semiconductor micromachining / edited by S.A. Campbell, H.J. Lewerenz. - Chichester, England ; New York : Wiley, c1998. c1998. - 2 v. : ill. ; 24 cm.
Distributer: Al-Ahram.
Includes bibliographical references and index.
v. 1. Fundamental electrochemistry and physics -- v. 2. Techniques and industrial applications.
Catalogued By: Mahitab.
0471966819 (v. 1 : alk. paper) 0471966827 (v. 2 : alk. paper) 0471980846 (set : alk. paper)
97026052
Semiconductors--Design and construction.
Micromachining.
Microfabrication.
621.38152 / CAM
Semiconductor micromachining / edited by S.A. Campbell, H.J. Lewerenz. - Chichester, England ; New York : Wiley, c1998. c1998. - 2 v. : ill. ; 24 cm.
Distributer: Al-Ahram.
Includes bibliographical references and index.
v. 1. Fundamental electrochemistry and physics -- v. 2. Techniques and industrial applications.
Catalogued By: Mahitab.
0471966819 (v. 1 : alk. paper) 0471966827 (v. 2 : alk. paper) 0471980846 (set : alk. paper)
97026052
Semiconductors--Design and construction.
Micromachining.
Microfabrication.
621.38152 / CAM