Rapid thermal processing :
Rapid thermal processing : science and technology / edited by Richard B. Fair. - San Diego : Academic Press, c.1993. - viii, 430 p. : ill. ; 24 cm.
Index : p. 425-430.
Includes bibliographical references.
0122476905 (acid-free paper)
93006882
Semiconductors----Heat treatment.
Semiconductor doping.
Rapid thermal processing.
621.38152 / RAP