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Handbook of thin film deposition :

Handbook of thin film deposition : techniques, processes, and technologies / edited by Krishna Seshan. - 3rd ed. - Waltham ; Oxford : William Andrew / Elsevier, 2012. - xviii, 392 p. : ill. ; 24 cm.

Includes bibliographical references and index.

ISBN: 9781437778731 1437778739

Subjects--Topical Terms:
Thin films.
Thin film devices--Design and construction.

Subjects--Geographic Terms:

Subjects--Index Terms:

Dewey Class. No.: 621.38152 / HAN

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