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Foundations of MEMS /

Liu, Chang

Foundations of MEMS / Chang Liu. - 2nd ed. / international edition contributions by Vaishali B. Mungurwadi, Anil V. Nandi. - Upper Saddle River : Prentice Hall, c2012. - 576 p. : ill ; 23 cm.

"International edition".

Includes bibliographical references and index.

ISBN: 0273752243 9780273752240

Subjects--Topical Terms:
Microelectromechanical systems.

Subjects--Index Terms:

Dewey Class. No.: 621.3 / LIU

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